Grain size dependence of dielectric relaxation in cerium oxide as high-k layer. (2013)
Attributed to:
Liquid injection ALD of Cp- based precursors for deposition of dielectric materials
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1186/1556-276x-8-172
PubMed Identifier: 23587419
Publication URI: http://europepmc.org/abstract/MED/23587419
Type: Journal Article/Review
Volume: 8
Parent Publication: Nanoscale research letters
Issue: 1
ISSN: 1556-276X