Dielectric relaxation of high-k oxides. (2013)
Attributed to:
Liquid injection ALD of Cp- based precursors for deposition of dielectric materials
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1186/1556-276x-8-456
PubMed Identifier: 24180696
Publication URI: http://europepmc.org/abstract/MED/24180696
Type: Journal Article/Review
Volume: 8
Parent Publication: Nanoscale research letters
Issue: 1
ISSN: 1556-276X