Ce(IV) complexes with donor-functionalized alkoxide ligands: improved precursors for chemical vapor deposition of CeO2. (2011)
Attributed to:
Liquid injection ALD of Cp- based precursors for deposition of dielectric materials
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1021/ic201593s
PubMed Identifier: 22017450
Publication URI: http://europepmc.org/abstract/MED/22017450
Type: Journal Article/Review
Volume: 50
Parent Publication: Inorganic chemistry
Issue: 22
ISSN: 0020-1669