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Tailoring precursors for deposition: synthesis, structure, and thermal studies of cyclopentadienylcopper(i) isocyanide complexes. (2015)

First Author: Willcocks AM

Attributed to: Liquid injection ALD of Cp- based precursors for deposition of dielectric materials funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1021/acs.inorgchem.5b00448

PubMed Identifier: 25938738

Publication URI: http://europepmc.org/abstract/MED/25938738

Type: Journal Article/Review

Volume: 54

Parent Publication: Inorganic chemistry

Issue: 10

ISSN: 0020-1669