Tailoring precursors for deposition: synthesis, structure, and thermal studies of cyclopentadienylcopper(i) isocyanide complexes. (2015)
Attributed to:
Liquid injection ALD of Cp- based precursors for deposition of dielectric materials
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1021/acs.inorgchem.5b00448
PubMed Identifier: 25938738
Publication URI: http://europepmc.org/abstract/MED/25938738
Type: Journal Article/Review
Volume: 54
Parent Publication: Inorganic chemistry
Issue: 10
ISSN: 0020-1669