(Invited) Vacuum Ultraviolet Photochemical Atomic Layer Deposition of Alumina and Titania Films (2015)
Attributed to:
Manufacturing with Light - photochemical ALD to manufacture functional thin films
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1149/06907.0139ecst
Publication URI: http://dx.doi.org/10.1149/06907.0139ecst
Type: Journal Article/Review
Parent Publication: ECS Transactions
Issue: 7
ISSN: 19386737