(Invited) Vacuum Ultraviolet Photochemical Atomic Layer Deposition of Alumina and Titania Films (2015)

First Author: Chalker P
Attributed to:  Mechanisms and Control of Resistive Switching in Dielectrics funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1149/06907.0139ecst

Publication URI: http://dx.doi.org/10.1149/06907.0139ecst

Type: Journal Article/Review

Parent Publication: ECS Transactions

Issue: 7

ISSN: 19386737