Vacuum ultraviolet photochemical selective area atomic layer deposition of Al 2 O 3 dielectrics (2015)

First Author: Chalker P

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1063/1.4905887

Publication URI: http://dx.doi.org/10.1063/1.4905887

Type: Journal Article/Review

Parent Publication: AIP Advances

Issue: 1

ISSN: 21583226