Electrical Test Structure for the Measurement of Hermeticity in Electronic and MEMS Packages With Small Cavity Volumes (2013)

First Author: Costello S
Attributed to:  An Innovative Electronics Manufacturing Research Centre funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1109/tsm.2013.2271213

Publication URI: http://dx.doi.org/10.1109/tsm.2013.2271213

Type: Journal Article/Review

Parent Publication: IEEE Transactions on Semiconductor Manufacturing

Issue: 3

ISSN: 0894-6507