Electrical Test Structures for the Characterization of Optical Proximity Correction (2012)
Attributed to:
An Innovative Electronics Manufacturing Research Centre
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1109/tsm.2011.2181669
Publication URI: http://dx.doi.org/10.1109/tsm.2011.2181669
Type: Journal Article/Review
Parent Publication: IEEE Transactions on Semiconductor Manufacturing
Issue: 2
ISSN: 0894-6507