Electrical Test Structures for the Characterization of Optical Proximity Correction (2012)

First Author: Tsiamis A

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1109/TSM.2011.2181669

Publication URI: http://dx.doi.org/10.1109/TSM.2011.2181669

Type: Journal Article/Review

Parent Publication: IEEE Transactions on Semiconductor Manufacturing

Issue: 2

ISSN: 0894-6507