Electrodeposition of copper into high aspect ratio PCB micro-via using megasonic agitation (2013)
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1007/s00542-013-1746-7
Publication URI: http://dx.doi.org/10.1007/s00542-013-1746-7
Type: Journal Article/Review
Parent Publication: Microsystem Technologies
Issue: 6
ISSN: 0946-7076