Fabrication and Measurement of Test Structures to Monitor Stress in SU-8 Films (2012)

First Author: Smith S

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1109/TSM.2012.2202797

Publication URI: http://dx.doi.org/10.1109/TSM.2012.2202797

Type: Journal Article/Review

Parent Publication: IEEE Transactions on Semiconductor Manufacturing

Issue: 3

ISSN: 0894-6507