Test Structures for Characterizing the Integration of EWOD and SAW Technologies for Microfluidics (2012)

First Author: Yifan Li

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1109/TSM.2012.2202770

Publication URI: http://dx.doi.org/10.1109/TSM.2012.2202770

Type: Journal Article/Review

Parent Publication: IEEE Transactions on Semiconductor Manufacturing

Issue: 3

ISSN: 0894-6507