Exceptional gettering response of epitaxially grown kerfless silicon (2016)

First Author: Powell D

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1063/1.4940947

Publication URI: http://dx.doi.org/10.1063/1.4940947

Type: Journal Article/Review

Parent Publication: Journal of Applied Physics

Issue: 6