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Atomic-layer deposited thulium oxide as a passivation layer on germanium (2015)

First Author: Mitrovic I

Attributed to: High permittivity dielectrics on Ge for end of Roadmap application funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1063/1.4922121

Publication URI: http://dx.doi.org/10.1063/1.4922121

Type: Journal Article/Review

Parent Publication: Journal of Applied Physics

Issue: 21