Nanometre scale 3D nanomechanical imaging of semiconductor structures from few nm to sub-micrometre depths (2015)
Attributed to:
Non-Destructive Nanoscale Resolution using a Carbon Nanotube Scanning Thermal Probe
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1109/iitc-mam.2015.7325609
Publication URI: http://dx.doi.org/10.1109/iitc-mam.2015.7325609
Type: Conference/Paper/Proceeding/Abstract