Nanometre scale 3D nanomechanical imaging of semiconductor structures from few nm to sub-micrometre depths (2015)

First Author: Kolosov O

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1109/IITC-MAM.2015.7325609

Publication URI: http://dx.doi.org/10.1109/IITC-MAM.2015.7325609

Type: Conference/Paper/Proceeding/Abstract