Concepts and characteristics of the 'COST Reference Microplasma Jet' (2016)
Attributed to:
Metrology concepts for a new generation of plasma manufacturing with atom-scale precision
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1088/0022-3727/49/8/084003
Publication URI: http://dx.doi.org/10.1088/0022-3727/49/8/084003
Type: Journal Article/Review
Parent Publication: Journal of Physics D: Applied Physics
Issue: 8