Influence of surface conditions on plasma dynamics and electron heating in a radio-frequency driven capacitively coupled oxygen plasma (2015)
Attributed to:
Metrology concepts for a new generation of plasma manufacturing with atom-scale precision
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1088/0963-0252/24/4/044003
Publication URI: http://dx.doi.org/10.1088/0963-0252/24/4/044003
Type: Journal Article/Review
Parent Publication: Plasma Sources Science and Technology
Issue: 4