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Coherence scanning interferometry: linear theory of surface measurement. (2013)

First Author: Coupland J

Attributed to: EPSRC Centre for Innovative Manufacturing in Ultra Precision funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1364/ao.52.003662

PubMed Identifier: 23736318

Publication URI: http://europepmc.org/abstract/MED/23736318

Type: Journal Article/Review

Volume: 52

Parent Publication: Applied optics

Issue: 16

ISSN: 1559-128X