Coherence scanning interferometry: linear theory of surface measurement. (2013)

First Author: Coupland J
Attributed to:  EPSRC Centre for Innovative Manufacturing in Ultra Precision funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1364/ao.52.003662

PubMed Identifier: 23736318

Publication URI: http://europepmc.org/abstract/MED/23736318

Type: Journal Article/Review

Volume: 52

Parent Publication: Applied optics

Issue: 16

ISSN: 1559-128X