Determination of the transfer function for optical surface topography measuring instruments-a review (2013)

First Author: Foreman M
Attributed to:  EPSRC Centre for Innovative Manufacturing in Ultra Precision funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/0957-0233/24/5/052001

Publication URI: http://dx.doi.org/10.1088/0957-0233/24/5/052001

Type: Journal Article/Review

Parent Publication: Measurement Science and Technology

Issue: 5