Calibration of the scales of areal surface topography measuring instruments: part 3. Resolution (2013)
Abstract
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Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1088/0957-0233/24/10/105010
Publication URI: http://dx.doi.org/10.1088/0957-0233/24/10/105010
Type: Journal Article/Review
Parent Publication: Measurement Science and Technology
Issue: 10