Practical estimation of measurement noise and flatness deviation on focus variation microscopes (2014)

First Author: Giusca C
Attributed to:  EPSRC Centre for Innovative Manufacturing in Ultra Precision funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.cirp.2014.03.086

Publication URI: http://dx.doi.org/10.1016/j.cirp.2014.03.086

Type: Journal Article/Review

Parent Publication: CIRP Annals

Issue: 1