Advances in engineering nanometrology at the National Physical Laboratory (2012)

First Author: Leach R
Attributed to:  EPSRC Centre for Innovative Manufacturing in Ultra Precision funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/0957-0233/23/7/074002

Publication URI: http://dx.doi.org/10.1088/0957-0233/23/7/074002

Type: Journal Article/Review

Parent Publication: Measurement Science and Technology

Issue: 7