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Fibre laser microvia drilling and ablation of Si with tuneable pulse shapes (2012)

First Author: Li K

Attributed to: EPSRC Centre for Innovative Manufacturing in Ultra Precision funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1007/s12541-012-0083-6

Publication URI: http://dx.doi.org/10.1007/s12541-012-0083-6

Type: Journal Article/Review

Parent Publication: International Journal of Precision Engineering and Manufacturing

Issue: 5