Comparison Between Single Shot Micromachining of Silicon With Nanosecond Pulse Shaped IR Fiber Laser and DPSS UV Laser (2014)

First Author: Li K
Attributed to:  EPSRC Centre for Innovative Manufacturing in Ultra Precision funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1109/jstqe.2013.2295352

Publication URI: http://dx.doi.org/10.1109/jstqe.2013.2295352

Type: Journal Article/Review

Parent Publication: IEEE Journal of Selected Topics in Quantum Electronics

Issue: 5