Coherence scanning interferometry: measurement and correction of three-dimensional transfer and point-spread characteristics. (2014)
Attributed to:
EPSRC Centre for Innovative Manufacturing in Ultra Precision
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1364/ao.53.001554
PubMed Identifier: 24663411
Publication URI: http://europepmc.org/abstract/MED/24663411
Type: Journal Article/Review
Volume: 53
Parent Publication: Applied optics
Issue: 8
ISSN: 1559-128X