Towards the development of a hybrid-integrated chip interferometer for online surface profile measurements. (2016)

First Author: Kumar P
Attributed to:  EPSRC Centre for Innovative Manufacturing in Advanced Metrology funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1063/1.4952952

PubMed Identifier: 27370493

Publication URI: http://europepmc.org/abstract/MED/27370493

Type: Journal Article/Review

Volume: 87

Parent Publication: The Review of scientific instruments

Issue: 6

ISSN: 0034-6748