Capacitively coupled hydrogen plasmas sustained by tailored voltage waveforms: excitation dynamics and ion flux asymmetry (2016)

First Author: Bruneau B
Attributed to:  Institute for Plasma Science, Technology and Fusion Energy funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/0963-0252/25/4/045019

Publication URI: http://dx.doi.org/10.1088/0963-0252/25/4/045019

Type: Journal Article/Review

Parent Publication: Plasma Sources Science and Technology

Issue: 4