Non-destructive imaging of buried electronic interfaces using a decelerated scanning electron beam. (2016)

First Author: Hirohata A
Attributed to:  High-resolution Electron Beam Lithography Critical Mass Grant funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1038/ncomms12701

PubMed Identifier: 27586090

Publication URI: http://europepmc.org/abstract/MED/27586090

Type: Journal Article/Review

Volume: 7

Parent Publication: Nature communications

ISSN: 2041-1723