Bridging the gap between global models and full fluid models: a fast 1D semi-analytical fluid model for electronegative plasmas (2016)
Attributed to:
Metrology concepts for a new generation of plasma manufacturing with atom-scale precision
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1088/0963-0252/25/4/045011
Publication URI: http://dx.doi.org/10.1088/0963-0252/25/4/045011
Type: Journal Article/Review
Parent Publication: Plasma Sources Science and Technology
Issue: 4