Spectroscopic ellipsometry characterization of ZnO:Sn thin films with various Sn composition deposited by remote-plasma reactive sputtering (2017)
Attributed to:
The Physics and Engineering of Oxide Semiconductors for Large-Area CMOS
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1016/j.apsusc.2016.10.169
Publication URI: http://dx.doi.org/10.1016/j.apsusc.2016.10.169
Type: Journal Article/Review
Parent Publication: Applied Surface Science