Dislocation-mediated plasticity in silicon during nanometric cutting: A molecular dynamics simulation study (2016)

First Author: Chavoshi S

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.mssp.2016.05.003

Publication URI: http://dx.doi.org/10.1016/j.mssp.2016.05.003

Type: Journal Article/Review

Parent Publication: Materials Science in Semiconductor Processing