Dislocation-mediated plasticity in silicon during nanometric cutting: A molecular dynamics simulation study (2016)
Abstract
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Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1016/j.mssp.2016.05.003
Publication URI: http://dx.doi.org/10.1016/j.mssp.2016.05.003
Type: Journal Article/Review
Parent Publication: Materials Science in Semiconductor Processing