Dislocation-mediated plasticity in silicon during nanometric cutting: A molecular dynamics simulation study (2016)
Attributed to:
Miniature Flexible & Reconfigurable Manufacturing System for 3D Micro-products
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1016/j.mssp.2016.05.003
Publication URI: http://dx.doi.org/10.1016/j.mssp.2016.05.003
Type: Journal Article/Review
Parent Publication: Materials Science in Semiconductor Processing