Young's modulus and residual stress of GeSbTe phase-change thin films (2015)
Attributed to:
Phase Change Materials based Tunable NEMS
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1016/j.tsf.2015.08.049
Publication URI: http://dx.doi.org/10.1016/j.tsf.2015.08.049
Type: Journal Article/Review
Parent Publication: Thin Solid Films