UV-LIGA microfabrication process for sub-terahertz waveguides utilizing multiple layered SU-8 photoresist (2016)
Attributed to:
THz backward wave oscillator for plasma diagnostic in nuclear fusion
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1088/0960-1317/26/9/095010
Publication URI: http://dx.doi.org/10.1088/0960-1317/26/9/095010
Type: Journal Article/Review
Parent Publication: Journal of Micromechanics and Microengineering
Issue: 9