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UV-LIGA microfabrication process for sub-terahertz waveguides utilizing multiple layered SU-8 photoresist (2016)

First Author: Malekabadi A

Attributed to: THz backward wave oscillator for plasma diagnostic in nuclear fusion funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/0960-1317/26/9/095010

Publication URI: http://dx.doi.org/10.1088/0960-1317/26/9/095010

Type: Journal Article/Review

Parent Publication: Journal of Micromechanics and Microengineering

Issue: 9