Low-loss silicon rectangular waveguides fabricated by anisotoropic wet etching for roughness reduction (2015)

First Author: Arimoto H
Attributed to:  Si Fin Optical Modulator for Low Power Interconnection funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1109/group4.2015.7305962

Publication URI: http://dx.doi.org/10.1109/group4.2015.7305962

Type: Conference/Paper/Proceeding/Abstract