Fabrication of multilayered SU8 structure for terahertz waveguide with ultralow transmission loss (2014)
Attributed to:
Terahertz Micromachined Resonator Superstructures
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1117/1.jmm.13.1.013002
Publication URI: http://dx.doi.org/10.1117/1.jmm.13.1.013002
Type: Journal Article/Review
Parent Publication: Journal of Micro/Nanolithography, MEMS, and MOEMS
Issue: 1