Fabrication of multilayered SU8 structure for terahertz waveguide with ultralow transmission loss (2014)

First Author: Tian Y
Attributed to:  Terahertz Micromachined Resonator Superstructures funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1117/1.jmm.13.1.013002

Publication URI: http://dx.doi.org/10.1117/1.jmm.13.1.013002

Type: Journal Article/Review

Parent Publication: Journal of Micro/Nanolithography, MEMS, and MOEMS

Issue: 1