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Hot-Wire Chemical Vapour Deposition for Silicon Nitride Waveguides (2016)

First Author: Domínguez Bucio T

Attributed to: Silicon Photonics for Future Systems funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1149/07204.0269ecst

Publication URI: http://dx.doi.org/10.1149/07204.0269ecst

Type: Journal Article/Review

Parent Publication: ECS Transactions

Issue: 4