Hot-Wire Chemical Vapour Deposition for Silicon Nitride Waveguides (2016)

First Author: Dominguez Bucio T
Attributed to:  Silicon Photonics for Future Systems funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1149/07204.0269ecst

Publication URI: http://dx.doi.org/10.1149/07204.0269ecst

Type: Journal Article/Review

Parent Publication: ECS Transactions

Issue: 4