Hot-Wire Chemical Vapour Deposition for Silicon Nitride Waveguides (2016)
Attributed to:
Silicon Photonics for Future Systems
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1149/07204.0269ecst
Publication URI: http://dx.doi.org/10.1149/07204.0269ecst
Type: Journal Article/Review
Parent Publication: ECS Transactions
Issue: 4