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Material and optical properties of low-temperature NH 3 -free PECVD SiN x layers for photonic applications (2017)

First Author: Domínguez Bucio T

Attributed to: Silicon Photonics for Future Systems funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/1361-6463/50/2/025106

Publication URI: http://dx.doi.org/10.1088/1361-6463/50/2/025106

Type: Journal Article/Review

Parent Publication: Journal of Physics D: Applied Physics

Issue: 2