Material and optical properties of low-temperature NH 3 -free PECVD SiN x layers for photonic applications (2017)

First Author: Domínguez Bucio T
Attributed to:  CORNERSTONE: Capability for OptoelectRoNics, mEtamateRialS, nanoTechnOlogy aNd sEnsing funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/1361-6463/50/2/025106

Publication URI: http://dx.doi.org/10.1088/1361-6463/50/2/025106

Type: Journal Article/Review

Parent Publication: Journal of Physics D: Applied Physics

Issue: 2