High speed e-beam writing for large area photonic nanostructures - a choice of parameters. (2016)
Attributed to:
UK Silicon Photonics
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1038/srep32945
PubMed Identifier: 27633902
Publication URI: http://europepmc.org/abstract/MED/27633902
Type: Journal Article/Review
Volume: 6
Parent Publication: Scientific reports
ISSN: 2045-2322