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Reactive dynamics analysis of critical Nb2O5 sputtering rate for drum-based metal-like deposition. (2017)

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1364/ao.56.00c206

PubMed Identifier: 28158147

Publication URI: http://europepmc.org/abstract/MED/28158147

Type: Journal Article/Review

Volume: 56

Parent Publication: Applied optics

Issue: 4

ISSN: 1559-128X