CMOS-compatible SOI micro-hotplate-based oxygen sensor (2016)
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1109/essderc.2016.7599640
Publication URI: http://dx.doi.org/10.1109/essderc.2016.7599640
Type: Conference/Paper/Proceeding/Abstract
ISSN: 19308876