SOI multidirectional thermoelectric flow sensor for harsh environment applications (2015)
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1109/smicnd.2015.7355173
Publication URI: http://dx.doi.org/10.1109/smicnd.2015.7355173
Type: Other
Volume: 2015-December
Parent Publication: Proceedings of the International Semiconductor Conference, CAS